Temperature Control Equipment

・With this chiller, cooling water can be obtained anywhere it is necessary
　because of easy installation and easy operation.
・For a wide range of applications, such as laser machine tools, analytical equipment,
　LCD manufacturing equipment, mold temperature control, etc.
・Compact: W 377 x H 615 x D 500 mm, 40 kg (HRS012/018/024)
・Timer function, Low liquid level protection, Power failure auto-restart,
　Anti-freezing function, etc.
・Self diagnosis function
・Ideal for overseas models (Single-phase 200 to 230 VAC, Single-phase 100, 115 VAC)
・Compliant with UL Standards, CE-marking

・Resistant to dusty or water splashing environment
・Protection of the electrical unit: IP54
・Metal panel
　Entire exterior surface is metal.
　Stainless steel panel can be selected. (Option)
・Large capacity tank (12 L)
・Ambient temperature: 5 to 45ºC

・Lightweight and compact
・Cooling capacity: 9 kW
・Temperature stability: ±0.5°C
・Set temperature range: 5 to 35°C
・Max. ambient temperature: 45°C
・Power supply: 3-phase 200 to 230 VAC, 380 to 415 VAC

・No heater is required, as the circulating fluid is heated using only
　the heat exhausted by the refrigerating circuit.
・Compatible with power supplies in Europe, Asia, Oceania, North, Central,
　and South America
・Low-noise design: 70 dB (A)
・Outdoor installation: IPX4
・Compact, Space saving

・3-phase 380 to 415 VAC(50Hz), 3-phase 460 to 480 VAC(60Hz)
・No heater is required, as the circulating fluid is heated using only
　the heat exhausted by the refrigerating circuit.
・Outdoor installation: IPX4
・Compact, Space saving

・Power consumption reduced by 53%
　Complete with energy-saving triple inverter!
・Cooling capacity: 9.5 kW (Air-cooled), 11.0 kW (Water-cooled)
・Temperature stability: ±0.1°C
・Set temperature range: 5°C to 40°C

・Complete with energy-saving triple inverter!
・Outdoor installation, Splashproof type (IPX4)
・Max. ambient temperature: 45℃
・Temperature stability: ±0.1℃ (When a load is stable)
・Space saving and lightweight: 280 kg (25 kW type)
・Compliant with UL Standards, CE-marking

・Complete with energy-saving triple control!
　Reduces power consumption by 33%
・Compact and lightweight: 32 kg (100 VAC)
・Maintenance-free: Magnet pump
・Low-noise design: 55 dB (A)

・Temperatures for 2 fluid channel systems can
　be controlled individually by one chiller.
・Space saving, Reduced wiring
・Footprint 22% reduction
・One power supply system for 2 channels
・Energy saving
　Power consumption reduced by 30%
・Touch panel
・Power supply: 3-phase 380 to 415 VAC (50/60 Hz)
　　　　　　　　 3-phase 460 to 480 VAC (60 Hz)

・Operable without the need to remove the unit from the rack
・Front access: Simple to control, service, and maintain with all filters
　and drainage accessible via the front panel
・Space saving: Multiple chillers can be mounted to a 19-inch rack.
・Cooling capacity: 1.1/1.2/1.8/2.4/3.0 kW (60 Hz)
・Temperature stability: ±0.1℃
・Global power supply:
　Single-phase 100 VAC (50/60 Hz)/115 VAC (60 Hz)
　Single-phase 200 to 230 VAC (50/60 Hz)

・Suitable for semiconductor processing equipment with a wide variety of features,
　such as high-temperature stability, a wide temperature range, failure diagnosis,
　external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking

・In addition to the state-of-the-art functions of the HRZ series,
　these models employ a DC inverter compressor to achieve better energy efficiency.
・A wide temperature range and cooling capacity range are covered by one unit.
・Suited to the short innovation cycle of semiconductor equipment,
　Capable of responding flexibly to changes in the process conditions
・Compliant with UL Standards, SEMI Standards, CE-marking

・Temperatures for 2 systems can be controlled separately by one chiller.
・Double inverter type: Substantially more energy is saved by using a DC inverter
　refrigerator and inverter pump.
・Space saving: Footprint reduced by 23%
・Reduced wiring, piping, and labor: Single power cable, Single facility-water piping system
・Compliant with SEMI Standards, CE-marking

・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not required.
・Suitable for semiconductor processing equipment with a wide variety of features,
　such as high-temperature stability, a wide temperature range, failure diagnosis,
　external communication, etc.
・Compliant with UL Standards, SEMI Standards, CE-marking
・It is possible to select the inverter type.