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Temperature Control Equipment
- Select from Temperature Range
- Select from Cooling Capacity and Temperature Stability
- Convenient Functions
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Thermo-chiller/High-performance Inverter Type HRZ
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・In addition to the state-of-the-art functions of the HRZ series,
these models employ a DC inverter compressor to achieve better energy efficiency. ・A wide temperature range and cooling capacity range are covered by one unit. ・Suited to the short innovation cycle of semiconductor equipment, Capable of responding flexibly to changes in the process conditions ・Compliant with UL Standards, SEMI Standards, CE-marking |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
Model |
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| HRZ | −20 to 90℃ 10 to 60℃ |
10 kW | ±0.1℃ | Water-cooled refrigeration |
Fluorinated liquid, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
Thermo-chiller/High-performance Inverter TypeHRZ
| Series | Download |
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| HRZ |
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