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IN_PROD_561
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Clean Series/Low-Particle Generation
IN_PROD_569
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Clean Gas Filters/Air Filters
Clean Gas Filter SF
・Cartridge type allows for element replacement
(SFA100/200/300, SFB100) ・Compact, disposable type for the semiconductor industry (SFB300, SFC100) |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
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Cartridge type Disc |
SFA100/200/300 | Max.0.99MPa (Vacuum:1.3×10-6kPa) |
0.01μm (Filtration efficiency 99.99%) |
Cartridge type Straight |
SFB100 | Max.0.99MPa (Vacuum:1.3×10-6kPa) |
0.01μm (Filtration efficiency 99.99%) |
Cartridge type Straight |
SFB200 | Max.0.99MPa (Vacuum:1.3×10-6kPa) |
120μm |
Disposable type Straight |
SFB300 | Max.0.99MPa (Vacuum:1.3×10-6kPa) |
0.01μm (Filtration efficiency 99.99%) |
Disposable type Multiple disc |
SFC100 | Max.0.99MPa (Vacuum:1.3×10-6kPa) |
0.01μm (Filtration efficiency 99.99%) |
Clean Gas FilterSF
Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Download |
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Cartridge type Disc |
SFA100/200/300 |
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Cartridge type Straight |
SFB100 |
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Cartridge type Straight |
SFB200 |
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Disposable type Straight |
SFB300 |
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Disposable type Multiple disc |
SFC100 |
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Clean Air Filter/Hollow Fiber Element SFD
・Built-in hollow fiber element
・Pressure drop: 0.03 MPa (Inlet pressure 0.7 MPa, Max. flow rate) ・Compliant with the RoHS Directives regulations regarding the reduction of environmentally detrimental chemicals |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
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SFD100 | Disposable type (Irreplaceable element) |
MAX.1.0MPa | 0.01μm (Filtration efficiency 99.99%) |
SFD200 | Cartridge type (Replaceable element) |
MAX.1.0MPa | 0.01μm (Filtration efficiency 99.99%) |
Clean Air Filter/Hollow Fiber ElementSFD
Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Download |
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SFD100 | Disposable type (Irreplaceable element) |
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SFD200 | Cartridge type (Replaceable element) |
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Clean Air Module LLB
・Modularized clean equipment (Reduced piping labor/Space saving)
Makes clean air easily available ・Nominal filtration rating: 0.01 μm (Filtration efficiency 99.99%) ・Wetted parts: Grease-free, Silicone-free ・Assembled in a clean room, Shipped and packed in double packaging ・24 combinations are available. Note) Inlet air conditions ISO 8573-1 Quality grade: Equivalent to 1.4.1 to 1.6.1 |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
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LLB3 | Clean air N2 gas Note) |
0.05 to 0.4MPa | 5 to 100 |
LLB4 | Clean air N2 gas Note) |
0.05 to 0.4MPa | 50 to 500 |
Clean Air ModuleLLB
Series | Download |
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LLB3 |
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LLB4 |
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