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IN_PROD_561
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Clean Series/Low-Particle Generation
IN_PROD_565
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Modular F.R./Pressure Control Equipment
Air Filter 10-/21-AF
Clean Series |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
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10-AF20 to 60 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 | 5 |
21-AF20 to 60 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 | 5 |
Air Filter10-/21-AF
Series | Download |
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10-AF20 to 60 |
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21-AF20 to 60 |
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Mist Separator 10-/21-AFM
Clean Series |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
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10-AFM20 to 40 | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.3 |
21-AFM20 to 40 | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.3 |
Mist Separator10-/21-AFM
Series | Download |
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10-AFM20 to 40 |
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21-AFM20 to 40 |
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Micro Mist Separator 10-/21-AFD
Clean Series |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
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10-AFD20 to 40 | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.01 |
21-AFD20 to 40 | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.01 |
Micro Mist Separator10-/21-AFD
Series | Download |
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10-AFD20 to 40 |
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21-AFD20 to 40 |
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Regulator 10-/21-AR
Clean Series |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
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10-AR20 to 60 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 | 0.05 to 0.85 |
21-AR20 to 60 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 | 0.05 to 0.85 |
Regulator10-/21-AR
Series | Download |
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10-AR20 to 60 |
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21-AR20 to 60 |
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Regulator with Backflow Function 10-/21-AR
Clean Series |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
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10-AR20K to 60K | 1/8, 1/4, 3/8, 1/2, 3/4, 1 | 0.05 to 0.85 |
21-AR20K to 60K | 1/8, 1/4, 3/8, 1/2, 3/4, 1 | 0.05 to 0.85 |
Regulator with Backflow Function10-/21-AR
Series | Download |
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10-AR20K to 60K |
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21-AR20K to 60K |
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Filter Regulator 10-/21-AW
Clean Series |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
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10-AW20 to 40 | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.05 to 0.85 | 5 |
21-AW20 to 40 | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.05 to 0.85 | 5 |
Filter Regulator10-/21-AW
Series | Download |
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10-AW20 to 40 |
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21-AW20 to 40 |
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Filter Regulator with Backflow Function 10-/21-AW□K
Clean Series |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
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10-AW20K to 40K | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.05 to 0.85 | 5 |
21-AW20K to 40K | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.05 to 0.85 | 5 |
Filter Regulator with Backflow Function10-/21-AW□K
Series | Download |
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10-AW20K to 40K |
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21-AW20K to 40K |
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Mist Separator Regulator 10-/21-AWM
Clean Series |
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Data Download
PDF
Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
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10-AWM20 to 40 | 1/8, 1/4, 3/8, 1/2 | 0.05 to 0.85 | 0.3 |
21-AWM20 to 40 | 1/8, 1/4, 3/8, 1/2 | 0.05 to 0.85 | 0.3 |
Mist Separator Regulator10-/21-AWM
Series | Download |
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10-AWM20 to 40 |
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21-AWM20 to 40 |
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Micro Mist Separator Regulator 10-/21-AWD
Clean Series |
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Data Download
PDF
Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
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10-AWD20 to 40 | 1/8, 1/4, 3/8, 1/2 | 0.05 to 0.85 | 0.01 |
21-AWD20 to 40 | 1/8, 1/4, 3/8, 1/2 | 0.05 to 0.85 | 0.01 |
Micro Mist Separator Regulator10-/21-AWD
Series | Download |
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10-AWD20 to 40 |
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21-AWD20 to 40 |
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Direct Operated Precision Regulator 10-/21-ARP
Clean Series ・Setting sensitivity: 0.2% F.S. or less ・Energy saving, reduces air consumption 80% (SMC comparison) ・Repeatability: ±1% F.S. or less (or ±3 kPa or less) ・With backflow function (ARP20K/30K/40K) Can be mounted between a solenoid valve and a cylinder. |
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Data Download
PDF
Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
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10-/21-ARP20 (K) | 1/8・1/4 | 0.005 to 0.4MPa 0.005 to 0.2MPa 0.005 to 0.6MPa |
10-/21-ARP30 (K) | 1/4・3/8 | 0.005 to 0.4MPa 0.005 to 0.2MPa 0.005 to 0.6MPa |
10-/21-ARP40 (K) | 1/4・3/8・1/2 | 0.005 to 0.4MPa 0.005 to 0.2MPa 0.005 to 0.6MPa |
Direct Operated Precision Regulator10-/21-ARP
Series | Download |
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10-/21-ARP20 (K) |
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10-/21-ARP30 (K) |
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10-/21-ARP40 (K) |
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Precision Regulator 10-IR
Clean Series ・Tension control ・Contact pressure control ・Setting sensitivity: 0.2% F.S. or less ・Repeatability: ±0.5% F.S. or less |
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Data Download
PDF
Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
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10-IR1000 | 1/8 | 0.005 to 0.2 0.005 to 0.4 0.005 to 0.8 |
10-IR2000 | 1/4 | 0.005 to 0.2 0.005 to 0.4 0.005 to 0.8 |
10-IR3000 | 1/4, 3/8, 1/2 | 0.01 to 0.2 0.01 to 0.4 0.01 to 0.8 |
Precision Regulator10-IR
Series | Download |
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10-IR1000 |
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10-IR2000 |
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10-IR3000 |
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Vacuum Regulator 10-IRV
Clean Series ・Allows adjustment of vacuum line pressure. ・Single sided connections series ・Weight reduced by 20% (Compared with the existing IRV2000 with IRV20 fitting) ・Built-in One-touch fittings ・Easy to attach/detach the pressure gauge or digital pressure switch due to attachment by clip. ・Mounting direction of the pressure gauge or digital pressure switch can be changed. (Standard connections only) ・Mounting angle of the pressure gauge or digital pressure switch can be changed easily (in 60 degree increments). |
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Data Download
PDF
Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
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10-IRV | φ6, φ8, φ1/4, φ5/16 | -100 to -1.3 |
10-IRV20 | φ6, φ8, φ10, φ1/4, φ5/16, φ3/8 | -100 to -1.3 |
Vacuum Regulator10-IRV
Series | Download |
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10-IRV |
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10-IRV20 |
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Clean Regulator SRH
・Contamination-controlled stainless steel regulator
・Oil-free ・2 types of diaphragm materials: PTFE, Fluororubber |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
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SRH | Non-relief | Rc1/8,1/4,3/8,1/2 9/16-18UNF,7/8-14UNF |
Low pressure type:0.02 to 0.2 High pressure type:0.05 to 0.7 |
SRH | Relief | Rc1/8,1/4,3/8,1/2 | Low pressure type:0.02 to 0.2 High pressure type:0.05 to 0.7 |
Clean RegulatorSRH
Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Download |
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SRH | Non-relief |
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SRH | Relief |
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Precision Clean Regulator SRP
・High-precision low flow consumption stainless steel regulator
・Bleed air flow of 0.5 L/min (ANR) or less (0.2 MPa at outlet pressure) ・Setting sensitivity: 0.3% F.S. ・Repeatability: 1% F.S. |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
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SRP | M5,1/8 | Low pressure type:0.005 to 0.2 High pressure type:0.01 to 0.4 |
Precision Clean RegulatorSRP
Series | Download |
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SRP |
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