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Clean Gas Filter SF
Products » WEB Catalog » Air Preparation Equipment » Air Preparation Filters
Products » WEB Catalog » Clean Series/Low-Particle Generation » Clean Gas Filters/Air Filters
・Cartridge type allows for element replacement
(SFA100/200/300, SFB100) ・Compact, disposable type for the semiconductor industry (SFB300, SFC100) |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
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Cartridge type Disc |
SFA100/200/300 | Max.0.99MPa (Vacuum:1.3×10-6kPa) |
0.01μm (Filtration efficiency 99.99%) |
Cartridge type Straight |
SFB100 | Max.0.99MPa (Vacuum:1.3×10-6kPa) |
0.01μm (Filtration efficiency 99.99%) |
Cartridge type Straight |
SFB200 | Max.0.99MPa (Vacuum:1.3×10-6kPa) |
120μm |
Disposable type Straight |
SFB300 | Max.0.99MPa (Vacuum:1.3×10-6kPa) |
0.01μm (Filtration efficiency 99.99%) |
Disposable type Multiple disc |
SFC100 | Max.0.99MPa (Vacuum:1.3×10-6kPa) |
0.01μm (Filtration efficiency 99.99%) |
Clean Gas FilterSF
Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Download |
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Cartridge type Disc |
SFA100/200/300 |
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Cartridge type Straight |
SFB100 |
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Cartridge type Straight |
SFB200 |
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Disposable type Straight |
SFB300 |
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Disposable type Multiple disc |
SFC100 |
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