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Diaphragm Valve for Ultra High Purity AZ
Products » WEB Catalog » Process Valves » Compact 2/3 Port Solenoid Valves
Products » WEB Catalog » Process Gas Equipment » Process Gas Equipment
・Cleaned for high-purity semiconductor applications and clean room assembled
・Helium leak tested ・SEMI Standards-compliant ・User-friendly forged body |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
Power consumption (W) |
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AZ | Air operated | 316L SS | Face seal Tube weld |
1/4'' 3/8'' 1/2 |
AZ | Manual | 316L SS | Face seal Tube weld |
1/4'' 3/8'' 1/2 |
Diaphragm Valve for Ultra High PurityAZ
Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Download |
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AZ | Air operated |
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AZ | Manual |
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