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WEB Catalog
Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ
Products » WEB Catalog » Process Gas Equipment » Process Gas Equipment
・For UHP gas delivery in semiconductor and other clean industries
・Body material: 316L SS secondary remelt or 316L SS ・Electropolished wetted parts ・External metal seal construction |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
Power consumption (W) |
Model |
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AP/SL | Single stage | Distribution (Compact) | 316L SS secondary remelt |
Face seal Tube weld |
1/4'', 3/8'' |
AP/SL | Single stage | Distribution | 316L SS secondary remelt |
Face seal Tube weld |
1/4'', 3/8'' 1/2'', 3/4'' |
AP/SL | Single stage | Bulk gas | 316L SS | Face seal Tube weld |
1/2'', 3/4'', 1'' |
AP/SL | Single stage | Source | 316L SS secondary remelt |
Face seal Tube weld |
1/4'', 3/8'' 1/2'', 3/4'' |
AP/SL | Single stage | Sub-atmospheric pressure | 316L SS secondary remelt |
Face seal Tube weld |
1/4'', 3/8'' 1/2'', 3/4'' |
AP | Two stage | Source | 316L SS secondary remelt |
Face seal Tube weld |
1/4'',3/8'' |
AZ | Single stage | Distribution | 316L SS | Face seal Tube weld |
1/4'', 3/8'' 1/2'' |
AZ | Single stage | Source | 316L SS | Face seal Tube weld |
1/4'', 3/8'' 1/2'' |
AZ | Single stage | Sub-atmospheric pressure | 316L SS | Face seal Tube weld |
1/4'', 3/8'' 1/2'' |
Regulators for Ultra High Purity (UHP)AP/SL/AP/AZ
Series | Download |
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AP/SL |
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AP/SL |
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AP/SL |
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AP/SL |
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AP/SL |
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AP |
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AZ |
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AZ |
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AZ |
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