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WEB Catalog
Diaphragm Valve for Ultra High Purity AP
Products » WEB Catalog » Process Gas Equipment » Process Gas Equipment
・For UHP gas delivery in semiconductor and other clean industries
・Used as a gas shutoff valve ・No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation. |
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Data Download
PDF
Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
Power consumption (W) |
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AP | Air operated | 316L SS secondary remelt |
Face seal Tube weld |
1/4'',3/8'' 1/2'',3/4'' |
AP | Manual | 316L SS secondary remelt |
Face seal Tube weld |
1/4'', 3/8'' 1/2'', 3/4'' |
Diaphragm Valve for Ultra High PurityAP
Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Download |
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AP | Air operated |
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AP | Manual |
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